Samco Inc.

Santa Clara,  CA 
United States
  • Booth: 820

PECVD, Plasma Etching & Surface Treatment System Solutions

Over the last 39 years, SAMCO has provided over 4,000 thin film process equipment solutions to our global partners in 23 countries. SAMCO manufactures a wide variety of unique etching (RIE, ICP, DRIE, XeF2 etch), deposition (ALD, PECVD) and surface treatment (Plasma and UV-Ozone Cleaning) process equipment for industrial customers and academic facilities globally. We provide both process expertise and turnkey systems to the failure analysis, compound semiconductor, MEMS, photonics, display, biomedical and other markets.  SAMCO’s systems are built to stringent quality and reliability standards and have a reputation of being both reliable and robust.  With our global manufacturing, R&D, demo facilities, sales and service locations, SAMCO Partners In the Progress of our customers, from lab to fab.  Learn more about SAMCO at

Brands: RIE-1C, RIE-10NR, RIE-200NL, RIE-300NR, RIE-200iP, RIE-800iPB, RIE-330iP, UV-2, PC-300, PD-220NL, PD-270STL, AQ-2000, ALD-2

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