Manufacturer of custom Plasma Etch and Deposition Equipment
Original equipment manufacturer of a wide variety of custom plasma etch, photoresist strip, and plasma deposition systems for the failure analysis, photovoltaic, optoelectronic, compound semiconductor, MEMS, and research markets. Laboratory and production tools. Small footprint, reliable, and low-cost systems.
Brands: Phantom RIE-ICP; Minilock-Phantom Loadlocked RIE-ICP; Orion PECVD; Minilock-Orion Loadlocked PECVD; Apollo Photoresist Strip/Ash/Descum