Trion Technology

Clearwater,  FL 
United States
  • Booth: 707

Manufacturer of custom Plasma Etch and Deposition Equipment

Original equipment manufacturer of a wide variety of custom plasma etch, photoresist strip, and plasma deposition systems for the failure analysis, photovoltaic, optoelectronic, compound semiconductor, MEMS, and research markets. Laboratory and production tools. Small footprint, reliable, and low-cost systems.

  • GaN Etch, GaAs Etch, SiO2 Etch, Si3N4 Etch.
  • SiO2 Deposition, Si3N4 Deposition.
  • Photoresist Stripping Systems/Ashers/Descum.

Brands: Phantom RIE-ICP; Minilock-Phantom Loadlocked RIE-ICP; Orion PECVD; Minilock-Orion Loadlocked PECVD; Apollo Photoresist Strip/Ash/Descum